VDMOS transistor and manufacturing method therefor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257332, 257333, 257335, 257336, 257345, H01L 2968

Patent

active

054422140

ABSTRACT:
A VDMOS transistor having a reduced drain/source resistance without a corresponding decrease in breakdown voltage and a manufacturing method therefor. Such a VDMOS transistor is created by gradually increasing the doping density of the transistor's implanted regions, while simultaneously increasing the respective thicknesses of the gate oxide layers corresponding to the implanted regions along the current flow path.

REFERENCES:
patent: 5298781 (1994-03-01), Cogan et al.

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