Illumination – Plural light sources – Particular wavelength
Reexamination Certificate
2007-03-06
2010-02-02
Connolly, Patrick J (Department: 2877)
Illumination
Plural light sources
Particular wavelength
C356S450000, C356S451000
Reexamination Certificate
active
07654685
ABSTRACT:
An illumination system for an interferometer combines a white-light source and a green source with a reflective green dichroic filter. When the green source alone is energized for PSI measurements, the output of the illumination system is green only. When a white-light output is desired for VSI measurements, both sources are energized and the intensity of the green light is judiciously calibrated to match the spectral band filtered out by the dichroic mirror. Therefore, the system can switch between green and white light simply by changing the selection of energized sources, without any mechanical switching and attendant delays and vibrations. Multiple narrowband sources may be combined with white light in a similar manner.
REFERENCES:
patent: 4071809 (1978-01-01), Weiss et al.
patent: 6623122 (2003-09-01), Yamazaki et al.
patent: 7401925 (2008-07-01), Lu
patent: 2005/0135095 (2005-06-01), Geissler
patent: 2006/0018119 (2006-01-01), Sugikawa et al.
Farrell Colin
Novak Erik L.
Wan Der-Shen
Connolly Patrick J
Durando Antonio R.
Veeco Instruments Inc.
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