Radiant energy – Inspection of solids or liquids by charged particles
Patent
1988-03-21
1989-06-20
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 250310, 250311, 250423F, G01N 2300
Patent
active
048411485
ABSTRACT:
A thermally compensated tube scanner scanning tunneling microscope utilizes two concentric piezoelectric tubes, one for scanning and one for coarse translation as well as fine adjustment of sample position while in tunneling range. There are no mechanical components such as springs, levers, gears, or stepper motors which are known to result in considerable vibration sensitivity and thermal drift. Consequently, the standard mode of atomic resolution operation for the device is without vibration isolation and with a thermal drift of less than 1 angstrom per hour.
REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4665313 (1987-05-01), Wells
patent: 4668865 (1987-05-01), Gimzewski et al.
Anderson Bruce C.
Aronoff Michael
The Board of Trustees of the University of Illinois
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