Variable resistance non-volatile memory cells and methods of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material

Reexamination Certificate

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Other Related Categories

C438S095000, C438S200000, C438S201000, C438S202000, C438S203000, C438S204000, C438S597000, C438S625000, C438S626000, C438S627000, C438S628000, C438S629000, C257S002000, C257S005000, C257S041000, C257S050000, C257S003000, C257S004000, C257S529000, C257S530000, C257SE21008, C257SE21019

Type

Reexamination Certificate

Status

active

Patent number

07863173

Description

ABSTRACT:
Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. An integrated circuit memory cell can be fabricated by forming a cup-shaped electrode on sidewalls of an opening in an insulation layer and through the opening on an ohmic layer that is stacked on a conductive structure. An insulation filling member is formed that at least partially fills an interior of the electrode. The insulation filling member is formed within a range of temperatures that is sufficiently low to not substantially change resistance of the ohmic layer. A variable resistivity material is formed on the insulation filling member and is electrically connected to the electrode.

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