Variable duty cycle, multiple frequency, plasma reactor

Details Variable duty cycle, multiple frequency, plasma reactor Variable duty cycle, multiple frequency, plasma reactor

1985-03-04

1986-04-29

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156626, 156646, 156345, 204192E, 204298, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

045855161

ABSTRACT:
A plasma reactor and a process for operating a plasma reactor are disclosed. The reactor comprises parallel plates in which one plate is connected to a source of high frequency signal and a second plate is connected to a source of low frequency signal. Control apparatus modulates one or both signals. In the process, the duty cycles of the modulating signals is controlled so that the signals overlap during at least a portion of their cycles.

REFERENCES:
patent: 4464223 (1984-08-01), Gorin
patent: 4500563 (1985-02-01), Ellenberger

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