Variable axis rotary drive vacuum deposition system

Details Variable axis rotary drive vacuum deposition system Variable axis rotary drive vacuum deposition system

1984-03-23

1986-04-22

Plantz, Bernard F.

Coating apparatus

Work holders, or handling devices

118729, 118730, 118733, 269 57, B05C 1300

Patent

active

045834881

ABSTRACT:
Apparatus in a vacuum deposition system positions a workpiece holder in substantial alignment with a source of material to be deposited onto a work piece affixed to the workpiece holder. The apparatus also rotates the workpiece holder about the deposition source and linearly drives the workpiece holder to varying distances from the deposition source. The apparatus used to drive the workpiece holder is sealably mounted atop an opening in the vacuum chamber. The apparatus enables multiple source depositions to be carried out consecutively without accessing the vacuum chamber. By aligning the workpiece holder over the deposition source, nonuniform deposition onto the workpiece is substantially eliminated.

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Moskowitz et al., "Non-Wearing Ferrofluidic Seals", SAE Prepr. #750851, Sep. 8-11, 1975.

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