Vaporizer apparatus and film deposition apparatus therewith

Gas and liquid contact apparatus – With external supply or removal of heat – Heat exchange means at or downstream of contact zone

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Details

2611121, 261155, 261157, 261DIG65, B01F 304

Patent

active

059519231

ABSTRACT:
A vaporizer apparatus efficiently vaporizes difficult-to-vaporize materials such as complex feed materials for producing a high dielectric or ferroelectric material. The vaporizer apparatus includes a vaporizing passage formed by a pair of opposed walls separated by a minute spacing to a liquid feed entrance provided at one end of the vaporizing passage, a vaporized feed exit provided at an opposite end of the vaporizing passage, and a heating arrangement for heating the walls to a temperature in excess of a vaporizing temperature of the liquid feed so that the liquid feed material may be guided into the vaporizing passage to be vaporized.

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patent: 5204314 (1993-04-01), Kirlin et al.
patent: 5431736 (1995-07-01), Boer

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