Electric resistance heating devices – Heating devices – Vaporizer
Patent
1995-02-24
1996-09-03
Walberg, Teresa J.
Electric resistance heating devices
Heating devices
Vaporizer
392399, 122 40, 122 41, F22B 128, F22B 2700
Patent
active
055531881
ABSTRACT:
A liquid vaporizer includes a stack of coaxially aligned, thermally conductive, thin, flat disks having different diameters. The larger diameter disks each include at least one aperture and preferably a plurality of closely spaced apertures radially located a predetermined distance from the center of the disk. The vaporizer further includes means for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures of the larger diameter disks over the liquid film on the portion of the surfaces of the larger diameter disks.
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MKS Instruments Inc.
Paik Sam
Walberg Teresa J.
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