Electric resistance heating devices – Heating devices – Vaporizer
Patent
1998-05-15
2000-12-05
Paik, Sang
Electric resistance heating devices
Heating devices
Vaporizer
239423, A01G 1306, F23D 1110
Patent
active
06157774&
ABSTRACT:
A vapor generating apparatus comprises: a convergent-divergent nozzle 50 having an inlet port 50a and an outlet port 50a for a gas for a vapor medium, the convergent-divergent nozzle 50 comprising a convergent nozzle portion 51a, which is formed so as to be tapered and narrowed from the inlet port 50a toward the outlet port 50b, and a divergent nozzle portion 51c, which is formed so as to be expanded from the convergent nozzle portion 51a toward the outlet port 50b; and a supply port 54 for a liquid to be evaporated, the supply port 54 being open to the divergent nozzle portion 51c of the convergent-divergent nozzle 50. Thus, it is possible to easily produce a gas using a smaller number of control factors, and it is possible to increase the amount of produced gas and decrease the vapor generating time.
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Komino Mitsuaki
Uchisawa Osamu
Motoyama Eng. Works, Ltd.
Paik Sang
Tokyo Electron Limited
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