Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Reexamination Certificate
2011-07-19
2011-07-19
Gravini, Stephen M. (Department: 3743)
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
C034S078000, C034S080000, C034S202000, C034S210000, C034S218000, C034S381000, C424S422000, C424S093700, C118S500000, C118S500000, C134S026000, C134S030000, C414S217000, C414S939000
Reexamination Certificate
active
07980000
ABSTRACT:
Embodiments of the present invention generally relate to an apparatus and methods for rinsing and drying substrates. One embodiment provides an end effector comprising a body having a contact tip for contacting an edge area of a substrate, wherein the end effector is configured to support the substrate while the substrate is in a rinsing bath and while the substrate is being dried from the rinsing bath, and the contact tip comprises a hydrophilic material.
REFERENCES:
patent: 3890305 (1975-06-01), Weber et al.
patent: 5156810 (1992-10-01), Ribi
patent: 5331987 (1994-07-01), Hayashi et al.
patent: 5445699 (1995-08-01), Kamikawa et al.
patent: 5520744 (1996-05-01), Fujikawa et al.
patent: 5798113 (1998-08-01), Dionne et al.
patent: 5800828 (1998-09-01), Dionne et al.
patent: 5800829 (1998-09-01), Dionne et al.
patent: 5834001 (1998-11-01), Dionne et al.
patent: 5849103 (1998-12-01), Bennett et al.
patent: 5869077 (1999-02-01), Dionne et al.
patent: 5871767 (1999-02-01), Dionne et al.
patent: 5874099 (1999-02-01), Dionne et al.
patent: 5884640 (1999-03-01), Fishkin et al.
patent: 5900245 (1999-05-01), Sawhney et al.
patent: 5938857 (1999-08-01), Fujiwara et al.
patent: 6027574 (2000-02-01), Fishkin et al.
patent: 6051248 (2000-04-01), Sawhney et al.
patent: 6058947 (2000-05-01), Bennett et al.
patent: 6083523 (2000-07-01), Dionne et al.
patent: 6119708 (2000-09-01), Fishkin et al.
patent: 6148833 (2000-11-01), Tang et al.
patent: 6192600 (2001-02-01), Bergman
patent: 6202658 (2001-03-01), Fishkin et al.
patent: 6207369 (2001-03-01), Wohlstadter et al.
patent: 6217894 (2001-04-01), Sawhney et al.
patent: 6220259 (2001-04-01), Brown et al.
patent: 6276371 (2001-08-01), Fishkin et al.
patent: 6299696 (2001-10-01), Kamikawa et al.
patent: 6311702 (2001-11-01), Fishkin
patent: 6322804 (2001-11-01), Dionne et al.
patent: 6328814 (2001-12-01), Fishkin et al.
patent: 6345630 (2002-02-01), Fishkin et al.
patent: 6352082 (2002-03-01), Mohindra et al.
patent: 6352710 (2002-03-01), Sawhney et al.
patent: 6361405 (2002-03-01), David et al.
patent: 6379929 (2002-04-01), Burns et al.
patent: 6395101 (2002-05-01), Scranton et al.
patent: 6412499 (2002-07-01), Tang et al.
patent: 6460551 (2002-10-01), Fishkin et al.
patent: 6468362 (2002-10-01), Chen et al.
patent: 6491043 (2002-12-01), Mohindra et al.
patent: 6513996 (2003-02-01), Subramanian et al.
patent: 6516816 (2003-02-01), Husain et al.
patent: 6531147 (2003-03-01), Sawhney et al.
patent: 6620260 (2003-09-01), Kumagai et al.
patent: 6673533 (2004-01-01), Wohlstadter et al.
patent: 6746544 (2004-06-01), Fishkin et al.
patent: 6790291 (2004-09-01), Kimura
patent: 6849308 (2005-02-01), Speakman et al.
patent: 6875289 (2005-04-01), Christenson et al.
patent: 6913919 (2005-07-01), Botstein et al.
patent: 6930170 (2005-08-01), Desnoyers et al.
patent: 6953836 (2005-10-01), Desnoyers et al.
patent: 6955516 (2005-10-01), Achkire et al.
patent: 6956108 (2005-10-01), Desnoyers et al.
patent: 6960351 (2005-11-01), Dionne et al.
patent: 6969690 (2005-11-01), Zhou et al.
patent: 6972185 (2005-12-01), Desnoyers et al.
patent: 7252098 (2007-08-01), Fishkin et al.
patent: 2001/0000728 (2001-05-01), Sawhney et al.
patent: 2001/0020482 (2001-09-01), Scranton et al.
patent: 2001/0021534 (2001-09-01), Wohlstadter et al.
patent: 2002/0036005 (2002-03-01), Kimura
patent: 2002/0037371 (2002-03-01), Kumagai et al.
patent: 2002/0072067 (2002-06-01), Ashkenazi et al.
patent: 2002/0072092 (2002-06-01), Ashkenazi et al.
patent: 2002/0072496 (2002-06-01), Ashkenazi et al.
patent: 2002/0072497 (2002-06-01), Ashkenazi et al.
patent: 2002/0103125 (2002-08-01), Ashkenazi et al.
patent: 2002/0121289 (2002-09-01), Brown et al.
patent: 2002/0123463 (2002-09-01), Ashkenazi et al.
patent: 2002/0127266 (2002-09-01), Sawhney et al.
patent: 2002/0127576 (2002-09-01), Ashkenazi et al.
patent: 2002/0132252 (2002-09-01), Ashkenazi et al.
patent: 2002/0132253 (2002-09-01), Ashkenazi et al.
patent: 2002/0137075 (2002-09-01), Ashkenazi et al.
patent: 2002/0137890 (2002-09-01), Ashkenazi et al.
patent: 2002/0142961 (2002-10-01), Ashkenazi et al.
patent: 2002/0150603 (2002-10-01), Dionne et al.
patent: 2002/0160384 (2002-10-01), Ashkenazi et al.
patent: 2002/0168671 (2002-11-01), Burns et al.
patent: 2002/0172969 (2002-11-01), Burns et al.
patent: 2002/0177164 (2002-11-01), Ashkenazi et al.
patent: 2002/0177551 (2002-11-01), Terman
patent: 2002/0193299 (2002-12-01), Ashkenazi et al.
patent: 2002/0193300 (2002-12-01), Ashkenazi et al.
patent: 2002/0197615 (2002-12-01), Ashkenazi et al.
patent: 2002/0197674 (2002-12-01), Ashkenazi et al.
patent: 2002/0198148 (2002-12-01), Ashkenazi et al.
patent: 2002/0198149 (2002-12-01), Ashkenazi et al.
patent: 2003/0003531 (2003-01-01), Ashkenazi et al.
patent: 2003/0008297 (2003-01-01), Ashkenazi et al.
patent: 2003/0017476 (2003-01-01), Ashkenazi et al.
patent: 2003/0017981 (2003-01-01), Ashkenazi et al.
patent: 2003/0017982 (2003-01-01), Ashkenazi et al.
patent: 2003/0022187 (2003-01-01), Ashkenazi et al.
patent: 2003/0027163 (2003-02-01), Ashkenazi et al.
patent: 2003/0027754 (2003-02-01), Ashkenazi et al.
patent: 2003/0027985 (2003-02-01), Ashkenazi et al.
patent: 2003/0032023 (2003-02-01), Ashkenazi et al.
patent: 2003/0035917 (2003-02-01), Hyman
patent: 2003/0039585 (2003-02-01), Freeman
patent: 2003/0040473 (2003-02-01), Ashkenazi et al.
patent: 2003/0044806 (2003-03-01), Ashkenazi et al.
patent: 2003/0045463 (2003-03-01), Ashkenazi et al.
patent: 2003/0049638 (2003-03-01), Ashkenazi et al.
patent: 2003/0049681 (2003-03-01), Ashkenazi et al.
patent: 2003/0049682 (2003-03-01), Ashkenazi et al.
patent: 2003/0050457 (2003-03-01), Ashkenazi et al.
patent: 2003/0054359 (2003-03-01), Ashkenazi et al.
patent: 2003/0054403 (2003-03-01), Ashkenazi et al.
patent: 2003/0054404 (2003-03-01), Ashkenazi et al.
patent: 2003/0054987 (2003-03-01), Ashkenazi et al.
patent: 2003/0059780 (2003-03-01), Ashkenazi et al.
patent: 2003/0059782 (2003-03-01), Ashkenazi et al.
patent: 2003/0059783 (2003-03-01), Ashkenazi et al.
patent: 2003/0059831 (2003-03-01), Ashkenazi et al.
patent: 2003/0059832 (2003-03-01), Ashkenazi et al.
patent: 2003/0059833 (2003-03-01), Ashkenazi et al.
patent: 2003/0060407 (2003-03-01), Ashkenazi et al.
patent: 2003/0064375 (2003-04-01), Ashkenazi et al.
patent: 2003/0068623 (2003-04-01), Ashkenazi et al.
patent: 2003/0068647 (2003-04-01), Ashkenazi et al.
patent: 2003/0069403 (2003-04-01), Ashkenazi et al.
patent: 2003/0073090 (2003-04-01), Ashkenazi et al.
patent: 2003/0073809 (2003-04-01), Ashkenazi et al.
patent: 2003/0077593 (2003-04-01), Ashkenazi et al.
patent: 2003/0077594 (2003-04-01), Ashkenazi et al.
patent: 2003/0082546 (2003-05-01), Ashkenazi et al.
patent: 2003/0083461 (2003-05-01), Ashkenazi et al.
patent: 2003/0087304 (2003-05-01), Ashkenazi et al.
patent: 2003/0087305 (2003-05-01), Ashkenazi et al.
patent: 2003/0089608 (2003-05-01), Kumekawa
patent: 2003/0089899 (2003-05-01), Lieber et al.
patent: 2003/0104032 (2003-06-01), Sawhney et al.
patent: 2003/0119055 (2003-06-01), Ashkenazi et al.
patent: 2003/0124531 (2003-07-01), Ashkenazi et al.
patent: 2003/0130182 (2003-07-01), Ashkenazi et al.
patent: 2003/0134284 (2003-07-01), Ashkenazi et al.
patent: 2003/0139329 (2003-07-01), Ashkenazi et al.
patent: 2003/0157113 (2003-08-01), Terman
patent: 2003/0194760 (2003-10-01), Ashkenazi et al.
patent: 2003/0219856 (2003-11-01), Ashkenazi et al.
patent: 2003/0224358 (2003-12-01), Ashkenazi et al.
patent: 2003/0228655 (2003-12-01), Ashkenazi et al.
patent: 2003/0228656 (2003-12-01), Ashkenazi et al.
patent: 2004/0086423 (2004-05-01), Wohlstadter et al.
patent: 2004/0136866 (2004-07-01), Pontis et al.
patent: 2004/0185083 (2004-09-01), Dionne et al.
patent: 2004/0198051 (2004-10-01), Hansen et al.
patent: 2004/0214783 (2004-10-01), Terman
patent: 2004/0234574 (2004-11-01), Sawhney et al.
patent: 2004/0241896 (2004-12-01), Zhou et al.
patent: 2005/0014226 (2005-01-01), Ashkenazi et al.
patent: 2005/0037491 (2005-02-01), Mistry et al.
patent: 2005/0112725 (2005-05-01), Ashkenazi et al.
patent: 2005/0143817 (2005-06-01), Hunter et al.
pate
Biese Michael
Chandrasekaran Balaji
Lewis John S.
Ling Tak Fan (Kerry)
Ramalingam Chidambara A.
Applied Materials Inc.
Gravini Stephen M.
Patterson & Sheridan L.L.P.
LandOfFree
Vapor dryer having hydrophilic end effector does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Vapor dryer having hydrophilic end effector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vapor dryer having hydrophilic end effector will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2717161