Valve with high temperature rating

Details Valve with high temperature rating Valve with high temperature rating

2006-11-16

2009-08-11

Fristoe, Jr., John K (Department: 3753)

Valves and valve actuation

Valve

Seats

C251S361000, C251S331000, C251S061100

Reexamination Certificate

active

07571893

ABSTRACT:
A valve comprises a valve seat and a movable diaphragm. The valve seat defines a fluid orifice and is formed at least partially of polybenzimidazole. The diaphragm is sized and configured to bear against the fluid orifice to substantially block fluid flow through the orifice. The valve is advantageously used in a hot zone of a semiconductor processing system.

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International Search Report and Written Opinion of the International Searching Authority dated Jan. 23, 2008, in counterpart International Patent Application No. PCT/US2007/079335.

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