Valves and valve actuation – Pivoted valves – Biased
Reexamination Certificate
2007-06-24
2010-12-07
Fristoe, Jr., John K (Department: 3753)
Valves and valve actuation
Pivoted valves
Biased
C251S177000, C251S333000
Reexamination Certificate
active
07845618
ABSTRACT:
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member coupled to an actuator by a ball joint. The ball joint is configured to allow movement of the door member relative to the lever arm around a center of the ball joint. In one embodiment, a sealing face of the elongated door is curved. In another embodiment, the chamber is one of a chemical vapor deposition chamber, a load lock chamber, a metrology chamber, a thermal processing chamber, or a physical vapor disposition chamber, a load lock chamber, a substrate transfer chamber or a vacuum chamber.
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Brown Paul
Kim Sam Hyungsam
Lee Jae-Chull
Sterling William N.
Applied Materials Inc.
Fristoe, Jr. John K
Patterson & Sheridan LLP
Tietjen Marina
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