Valve device for a particle beam apparatus

Details Valve device for a particle beam apparatus Valve device for a particle beam apparatus

1991-01-07

1992-03-03

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044011, H01J 3720

Patent

active

050935780

ABSTRACT:
A particle beam apparatus comprises a valve device which is arranged between a high-vacuum space and a further vacuum space and which serves to open and close a pump aperture. The valve device comprises a valve whereto a translatory movement can be externally imparted. A movement in a direction other than that of the translatory movement is imparted to the valve by cooperation between a valve head and an abutment face prior to the actual closing. To this end, the valve is provided, for example with a leaf spring construction and a ball bearing may be included between the abutment space and the valve head.

REFERENCES:
patent: 2508317 (1950-05-01), Verhoeff
patent: 2666539 (1954-01-01), Avery
patent: 4020353 (1977-04-01), Saito et al.
patent: 4241259 (1980-12-01), Feuerbaum et al.
patent: 4833362 (1989-05-01), Crewe

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