Work holders – With fluid means – Vacuum-type holding means
Patent
1986-04-24
1988-05-17
Hall, Carl E.
Work holders
With fluid means
Vacuum-type holding means
292814, 29413, 225 2, 225 96, B23P 1700, B25B 1100
Patent
active
047445505
ABSTRACT:
A vacuum wafer expander apparatus and method of wafers for use in electrical circuitry. A plurality of electronic semiconductor devices being connected to a flexible member means suitable for are mounted on a brace or bracket frame member means. The brace or bracket frame member means is suitable for being removably mounted on a bracket mounting means having a groove therearound for accommodating a vacuum therein to allow an abutting portion of the flexible material to be pushed in said groove; thus expanding the flexible member means as well as the plurality of electronic semiconductor devices thereon. The electronic semiconductor devices can thereafter be optically inspected and individually picked up from the flexible member means for processing.
REFERENCES:
patent: 2970730 (1961-02-01), Schwarz
patent: 3537169 (1970-11-01), Eigemen et al.
patent: 3562058 (1971-02-01), Boyd
patent: 3657791 (1972-04-01), Hobbs
patent: 3677875 (1972-07-01), Althouse
patent: 3727282 (1973-04-01), Neary
patent: 3918150 (1975-11-01), Gantley
patent: 4296542 (1981-10-01), Gotman
ASM America Inc.
Hall Carl E.
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