Vacuum wafer expander apparatus

Work holders – With fluid means – Vacuum-type holding means

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Details

292814, 29413, 225 2, 225 96, B23P 1700, B25B 1100

Patent

active

047445505

ABSTRACT:
A vacuum wafer expander apparatus and method of wafers for use in electrical circuitry. A plurality of electronic semiconductor devices being connected to a flexible member means suitable for are mounted on a brace or bracket frame member means. The brace or bracket frame member means is suitable for being removably mounted on a bracket mounting means having a groove therearound for accommodating a vacuum therein to allow an abutting portion of the flexible material to be pushed in said groove; thus expanding the flexible member means as well as the plurality of electronic semiconductor devices thereon. The electronic semiconductor devices can thereafter be optically inspected and individually picked up from the flexible member means for processing.

REFERENCES:
patent: 2970730 (1961-02-01), Schwarz
patent: 3537169 (1970-11-01), Eigemen et al.
patent: 3562058 (1971-02-01), Boyd
patent: 3657791 (1972-04-01), Hobbs
patent: 3677875 (1972-07-01), Althouse
patent: 3727282 (1973-04-01), Neary
patent: 3918150 (1975-11-01), Gantley
patent: 4296542 (1981-10-01), Gotman

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