Vacuum treatment system for depositing thin coatings

Details Vacuum treatment system for depositing thin coatings Vacuum treatment system for depositing thin coatings

1998-04-09

1999-11-30

Edwards, Laura

Coating apparatus

Gas or vapor deposition

Multizone chamber

118729, 118 50, 118 64, 118500, 20429825, 20429826, 20429827, 20429828, C23C 1400

Patent

active

059935561

ABSTRACT:
A vacuum treatment system for depositing thin coatings on substrates, with several stationary treating chambers that are held by the annular or frame-like side wall of the vacuum chamber and display the treatment tools and with treatment chamber openings aligned peripherally inward on the center of the vacuum chamber and extending in planes parallel to each other, a shaft, extending parallel to the opening planes and mounted in the vacuum chamber lid and/or in the vacuum chamber bottom plate of the vacuum chamber, is provided that moves the plates for closing the treatment chamber openings and is supplied with actuators for moving the closing plates from a radially inner opening position to a radially outer closing position, whereby the actuators working together with the shaft are designed as lever pinions.

REFERENCES:
patent: 5288379 (1994-02-01), Namiki et al.
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5709785 (1998-01-01), LeBlanc, III et al.
patent: 5855681 (1999-01-01), Maydan et al.

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