Vacuum treatment system and process for manufacturing...

Details Vacuum treatment system and process for manufacturing... Vacuum treatment system and process for manufacturing...

2007-02-20

2007-02-20

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S192120, C204S298030, C204S298230, C118S708000, C118S729000, C156S345240, C156S354000, C427S008000

Reexamination Certificate

active

10926942

ABSTRACT:
A process is disclosed for manufacturing coated substantially plane workpieces, in which the workpieces are guided to a vacuum treatment area guided by a control. The treatment atmosphere is modulated in the treatment area as a function of workpiece position with the defined profile. The system and process can be used to deposit defined layer thickness distribution profiles on substrates in a reactive coating.

REFERENCES:
patent: 5154810 (1992-10-01), Kamerling et al.
patent: 5225057 (1993-07-01), LeFebvre et al.
patent: 5423970 (1995-06-01), Kugler
patent: 6572738 (2003-06-01), Zueger
patent: 6783641 (2004-08-01), Zueger
patent: 813 251 (1959-08-01), None
patent: 3-264667 (1991-11-01), None
patent: 6-41732 (1994-02-01), None
patent: 11-050239 (1999-02-01), None

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