Vacuum treatment apparatus

Details Vacuum treatment apparatus Vacuum treatment apparatus

1995-03-13

1996-11-05

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Multizone chamber

118729, 118730, 20429807, C23C 1600

Patent

active

055713319

ABSTRACT:
Vacuum treatment apparatus including at least two chambers that are linked by a transit opening. A valve body pivotally linked within the opening pivots around a pivot axis that is disposed transversely in the opening. A drive for pivoting the valve body around the pivot axis also provided. The valve body has at least one workpiece carrier to be transported by pivoting the valve body around the pivot axis between the two chambers. An expandable seal arrangement is provided around the opening. The seal arrangement is expandable by pressure of a pressurizing medium, so as to seal the body against the opening in dependency of the pressure of the pressurizing medium.

REFERENCES:
patent: 5439547 (1995-08-01), Kumagai
patent: 5470784 (1995-11-01), Coleman
patent: 5474410 (1995-12-01), Ozawa et al.
patent: 5474641 (1995-12-01), Otsuki et al.
patent: 5503675 (1996-04-01), Zejda
patent: 5505779 (1996-04-01), Mizuno et al.
patent: 5515986 (1996-05-01), Turlot et al.

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