Vacuum system comprising an evacuatable housing, an object holde

Details Vacuum system comprising an evacuatable housing, an object holde Vacuum system comprising an evacuatable housing, an object holde

1990-10-11

1992-02-18

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250311, 250310, 250307, H01J 3720

Patent

active

050897080

ABSTRACT:
In a vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto, the object carrier in one form is constructed to rotate about one axis relative to the housing or in a second form rotates about an orthogonal axis and which forms are interchangeable. A supporting element of the object carrier is driven by a push member or by a piezo-electric element in different embodiments. The object carrier is introduced through a lock in a side wall of the vacuum system and can be coupled to and uncoupled from the object holder by means of a special tool.

REFERENCES:
patent: 3702399 (1972-11-01), Lucas
patent: 3745341 (1973-07-01), Sakitani
patent: 3952203 (1976-04-01), Hoppe
patent: 4292523 (1981-09-01), Hoppe
C. J. Rakels, J. C. Tiemeijer and K. W. Witteveen, "The Philips Electron Microscope EM 300", Philips Technical Review, 1968, Number 12, vol. 29, pp. 370-386.

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