Vacuum pump control device and vacuum device

Pumps – Condition responsive control of pump drive motor – With condition responsive control of pump fluid valve

Reexamination Certificate

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C417S044100, C417S044110

Reexamination Certificate

active

07731484

ABSTRACT:
The present invention has an object of controlling power consumption by a vacuum pump by varying the number of revolutions of the vacuum pump in accordance with the operating state of a vacuum device.The condition setting part4sets the relationship between the operating state of the vacuum device10and the rotational speed of the vacuum pump2that evacuates the vacuum device10. This relationship is set to an appropriate value so as to prevent the rotational speed of the vacuum pump2from becoming a higher rotational speed than is required. The control part6, to which external signals S1through Sn corresponding to the operating state of the vacuum device10are input, reads out from the condition setting part4and outputs the rotational speed of the vacuum pump2corresponding to the external signals. The inverter8controls the rotational speed of the vacuum pump based on the output of the control part6.

REFERENCES:
patent: 4664601 (1987-05-01), Uchida et al.
patent: 6244825 (2001-06-01), Sasaki et al.
patent: 58-093494 (1983-06-01), None
patent: 58-93494 (1983-06-01), None
patent: 62-102883 (1987-06-01), None
patent: 5-118289 (1993-05-01), None
patent: 5-231381 (1993-09-01), None
patent: 2000-110735 (2000-04-01), None
Dec. 14, 2005 official Communication and Supplementary European Search Report in connection with European Appl. No. EP 03 71 2801.

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