Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2005-02-22
2005-02-22
Mills, Gregory (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C427S569000
Reexamination Certificate
active
06858087
ABSTRACT:
A vacuum-processing apparatus comprising a vacuum vessel, a processing chamber arranged in the vacuum vessel and a heater for heating a circumferential wall of the processing chamber, wherein a substrate is arranged in the processing chamber and the substrate is vacuum-processed in the processing chamber, characterized in that the vacuum-processing apparatus has a cooling plate located outside the processing chamber and arranged at a position to oppose the circumferential wall of the processing chamber for cooling the circumferential wall of the processing chamber, and a mechanism for moving the cooling plate so as to change a distance between the cooling plate and the circumferential wall of the processing chamber. A vacuum-processing method for performing a surface treatment for a substrate using the vacuum-processing apparatus.
REFERENCES:
patent: 4400409 (1983-08-01), Izu et al.
patent: 4920918 (1990-05-01), Adams et al.
patent: 5116562 (1992-05-01), Lang
patent: 5254171 (1993-10-01), Hayakawa et al.
patent: 5411076 (1995-05-01), Matsunaga et al.
patent: 5470397 (1995-11-01), Foote et al.
patent: 5778968 (1998-07-01), Hendrickson et al.
patent: 5785796 (1998-07-01), Lee
patent: 5927994 (1999-07-01), Kohda et al.
patent: 5961850 (1999-10-01), Satou et al.
patent: 5976257 (1999-11-01), Kanai et al.
patent: 5997649 (1999-12-01), Hillman
patent: 6086362 (2000-07-01), White et al.
patent: 6097005 (2000-08-01), Akimoto
patent: 6113732 (2000-09-01), Yoshida et al.
patent: 6159300 (2000-12-01), Hori et al.
patent: 6302966 (2001-10-01), Bailey et al.
patent: 09275092 (1997-10-01), None
Hori Tadashi
Kanai Masahiro
Moriyama Koichiro
Ozaki Hiroyuki
Shimoda Hiroshi
Crowell Michelle
Mills Gregory
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