Vacuum processing device

Details Vacuum processing device Vacuum processing device

2005-08-23

2005-08-23

Mills, Gregory (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C118S730000

Reexamination Certificate

active

06932885

ABSTRACT:
A vacuum processing device includes a driven body122provided inside a vacuum processing chamber104, a driving means126provided outside the vacuum processing chamber104and a drive shaft124connecting the driven body122to the driving means126. A first annular body152is secured to the drive shaft124and a second annular body150is rotatably supported by the first annular body152. A bellows148that airtightly seals the periphery of the drive shaft124is provided so as to connect the second annular body150with the inner wall of the vacuum processing chamber104. In this structure, the bellows148is allowed to move as one body with the drive shaft124during vertical motion of the drive shaft124but is made to stay in place during rotational motion of the drive shaft124. Thus, the drive shaft, which engages in vertical motion and rotational motion, is airtightly sealed by the bellows.

REFERENCES:
patent: 05332456 (1993-12-01), None
patent: 07231028 (1995-08-01), None
patent: 11214489 (1999-08-01), None

Affiliated with

Also associated with

Rating

Vacuum processing device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum processing device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum processing device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3478535