Vacuum processing apparatus wherein temperature can be controlle

Details Vacuum processing apparatus wherein temperature can be controlle Vacuum processing apparatus wherein temperature can be controlle

1987-09-09

1988-09-20

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118724, 118725, 118728, 204298, 156345, C23C 1434, C23C 1600

Patent

active

047717300

ABSTRACT:
A vacuum processing apparatus has a vacuum vessel within which a work to be processed is drawn and held fixed on a specimen table by an electrode functioning doubly as an electrostatic chuck, to which is connected a gas feeding pipe for feeding a gas affording good heat transmission between the mutually contacting surfaces of the work and the electrode thereby to control the temperature of the work.

REFERENCES:
patent: 4313783 (1982-02-01), Davies

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