Vacuum processing apparatus and operating method therefor

Details Vacuum processing apparatus and operating method therefor Vacuum processing apparatus and operating method therefor

2006-08-15

2006-08-15

Rinehart, Kenneth (Department: 3749)

Drying and gas or vapor contact with solids

Apparatus

Vacuum

C034S060000, C134S085000, C134S902000, C414S939000, C414S940000

Reexamination Certificate

active

07089680

ABSTRACT:
A vacuum processing apparatus which includes a means for transferring substrates from a loader, with a transferring device, to a double lock chamber; and, then to a selected vacuum processing chamber. The substrates are returned to a substrate, by the vacuum loader, into their original position in the substrate table. The surfaces of the substrates are maintained in a horizontal position during processing.

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