Vacuum processing apparatus and exhaust system that prevents par

Details Vacuum processing apparatus and exhaust system that prevents par Vacuum processing apparatus and exhaust system that prevents par

1993-11-19

1995-07-18

Breneman, R. Bruce

Coating apparatus

With vacuum or fluid pressure chamber

118715, 118719, 20429833, C23C 1600, C23C 1400

Patent

active

054337801

ABSTRACT:
A vacuum processing apparatus comprises a vacuum processing chamber for subjecting an object to be processed to a predetermined vacuum processing, an auxiliary vacuum chamber whose internal pressure is variable repeatedly between an atmospheric pressure and a process pressure, when the object is put in and taken out of the vacuum processing chamber, and exhaust system for exhausting a gas from the auxiliary vacuum chamber. The exhaust system has at least one exhaust port located apart from an internal wall surface of the auxiliary vacuum chamber.

REFERENCES:
patent: 3875068 (1975-04-01), Mitzel
patent: 4269137 (1981-05-01), Johnson
patent: 5024182 (1991-06-01), Kobayashi
patent: 5054420 (1991-10-01), Raghavan
patent: 5076205 (1991-12-01), Vowles
patent: 5135608 (1992-08-01), Okutani
patent: 5186756 (1993-02-01), Benko
patent: 5227340 (1993-07-01), Pintchouski
patent: 5250092 (1993-10-01), Nakano
patent: 5304248 (1994-04-01), Cheng
patent: 5316579 (1994-05-01), McMillan

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