Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

2008-08-29

2010-11-16

Moore, Karla (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With etchant gas supply or exhaust structure located outside...

C156S345310, C156S345510, C118S719000, C118S7230AN, C118S728000, C118S732000, C414S939000

Reexamination Certificate

active

07833382

ABSTRACT:
A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and amass flow controller unit interposed between two processing chambers for supplying gas to the chambers.

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