Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

2011-07-12

2011-07-12

Moore, Karla (Department: 1712)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C118S7230AN, C156S345200

Reexamination Certificate

active

07976632

ABSTRACT:
A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.

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