Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1996-01-04
1997-03-18
Keenan, James W.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414416, 4147446, 414939, B65G 4907
Patent
active
056116551
ABSTRACT:
A vacuum process apparatus includes a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed, at least one preliminary vacuum chamber connected to the convey chamber through a loading/unloading port, a plurality of vacuum process chambers connected to the convey chamber through the loading/unloading ports and each having a vacuum process mechanism, a plurality of gate valves for opening/closing the plurality of loading/unloading ports, and a multi-joint arm member, arranged in the convey chamber, for conveying the target object between the convey chamber and the vacuum process chambers, and between the convey chamber and the preliminary chamber. The convey chamber is evacuated through a bearing for a pivot shaft of the multi-joint arm member.
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Aoyagi Minoru
Fukasawa Yoshio
Hosoda Shozo
Ishihara Yasumasa
Kajihara Mahito
Keenan James W.
Tokyo Electron Limited
Tokyo Electron Yamanashi Limited
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