Vacuum process apparatus and method of operating the same

Details Vacuum process apparatus and method of operating the same Vacuum process apparatus and method of operating the same

2005-07-12

2005-07-12

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S101000, C700S121000

Reexamination Certificate

active

06917844

ABSTRACT:
A vacuum process apparatus includes a plurality of cassettes for holding samples, a transporter which transports the samples, a plurality of vacuum process chambers each for processing samples one by one, an evacuator which evacuates the vacuum process chambers, and a load chamber and an unload chamber communicating with the vacuum process chambers. An apparatus controller is provided for controlling transporting and processing of the samples. The apparatus controller measures a time period for transporting each of the samples and a processing time period for processing a sample in each of the vacuum process chambers, and determines a next order of extraction of the samples from the plurality of cassettes based on the measured time periods.

REFERENCES:
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patent: 5928389 (1999-07-01), Jevtic
patent: 6122566 (2000-09-01), Nguyen et al.
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patent: 6274507 (2001-08-01), Narita et al.
patent: 6340405 (2002-01-01), Park
patent: 6353769 (2002-03-01), Lin
patent: 6480756 (2002-11-01), Luh et al.

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