Vacuum plate having a symmetrical air-load block

Details Vacuum plate having a symmetrical air-load block Vacuum plate having a symmetrical air-load block

2005-05-03

2005-05-03

Mills, Gregory (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S725000, C118S724000, C118S728000, C118S500000, C156S345290, C156S345510, C156S345520, C156S345530, C156S916000, C156S912000

Reexamination Certificate

active

06887315

ABSTRACT:
A vacuum plate for a fabricating apparatus of a semiconductor device, the vacuum plate includes: a first vacuum panel having a plurality of exhaust holes, the plurality of exhaust holes having same area and same distance from a center of the first vacuum panel, the plurality of exhaust holes being symmetrical and spaced apart from each other; and a second vacuum panel having a sidewall, a pumping hole and an air-load block, the sidewall being vertically protruded along an edge of the second vacuum panel, the air-load block being vertically protruded and symmetrical, a bottom surface of the first vacuum panel contacting a top surface of the sidewall and a top surface of the air-load block, thereby the first and second vacuum panels being combined.

REFERENCES:
patent: 6402848 (2002-06-01), Horiguchi et al.
patent: 62211914 (1987-09-01), None

Affiliated with

Also associated with

Rating

Vacuum plate having a symmetrical air-load block does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum plate having a symmetrical air-load block, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum plate having a symmetrical air-load block will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3378417