Vacuum plasma processing wherein workpiece position is detected

Details Vacuum plasma processing wherein workpiece position is detected Vacuum plasma processing wherein workpiece position is detected

1995-03-17

1997-09-23

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912143, 361233, 269903, 279128, B23K 1000

Patent

active

056700660

ABSTRACT:
A determination of whether a workpiece is properly positioned on an electrostatic chuck in a vacuum plasma processing chamber is made by measuring the capacitance across a pair of electrodes of the chuck. If the chuck is properly positioned, the workpiece is held in situ on the chuck by applying a DC voltage to the chuck. The workpiece is then processed by the plasma.

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