Vacuum optical system

Details Vacuum optical system Vacuum optical system

1993-09-09

1995-07-11

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378145, 359871, G02B 2126

Patent

active

054328314

ABSTRACT:
A vacuum optical system has a vacuum chamber for housing an optical system used in a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.

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P. S. Duke; X-Ray Microscopy at the Daresbury Laboratory, X-Ray Microscopy, Springer-Verlag, 1984, pp. 232-241.
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Bruce, et al: Scanning Fabry-Perot Interferometer for Precision Measurement Rev. Sci. Instrum., vol. 46, No. 4, Apr. 1975, pp. 379-382.
Trail et al: Compace Scanning Soft-X-Ray Microscope Using a Laser-Produced Plasma Source and Normal-Incidence Multilayer Mirrors, Jun. 1, 1989/vol. 14, No. 11/Optics Letters, pp. 539-541.

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