Vacuum monitoring

Details Vacuum monitoring Vacuum monitoring

1975-11-17

1977-02-22

Scovronek, Joseph

Measuring and testing

Gas analysis

Moisture content or vapor pressure

23232E, 23254E, 29593, 340236, 427 10, 427109, 427123, G01L 912, G01N 2704

Patent

active

040086194

ABSTRACT:
Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.

REFERENCES:
patent: 2533339 (1950-12-01), Willenborg
patent: 3012432 (1961-12-01), Moore et al.
patent: 3232712 (1966-02-01), Stearns
patent: 3374112 (1968-03-01), Danon
patent: 3924219 (1975-12-01), Braun

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