Vacuum-compatible air-cooled plasma device

Electric heating – Metal heating – By arc

Patent

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Details

219121PM, 219121PR, 219121EQ, 20419231, 31511121, 174 14R, B23K 1500

Patent

active

046598995

ABSTRACT:
A plasma generating device, and in particular a duoplasmatron ion gun, is disclosed that is air cooled, high vacuum compatible and hence very clean with a stable ion current output. The device is mounted to a standard type flange held at ground potential without the necessity of subsequent high voltage isolation. Cooling is achieved with cooling fins and a fan inside a housing in which the duoplasmatron is mounted. A mounting structure includes a vacuum tight ceramic ring brazed between the mounting flange and the gun body. The ceramic ring is located with respect to high permeability magnetic components and a magnetic coil to facilitate a magnetic field for focusing the plasma, allowing the coil to be referenced to ground potential while the gun is maintained at high voltage. A ceramic chamber containing ceramic pellets is located in the plasma-forming gas inlet duct to prevent high voltage electrical discharge in the gas duct. A piezoelectric valve operated by a pressure sensor maintains accurate gas flow and ion output.

REFERENCES:
patent: 2547440 (1951-04-01), Clark et al.
patent: 2961558 (1960-11-01), Luce et al.
patent: 3162716 (1964-12-01), Silver
patent: 3622782 (1971-11-01), Smith et al.
patent: 4163889 (1979-08-01), Schoenmakers
patent: 4405853 (1983-09-01), Klein

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