Vacuum coating apparatus for overall coating of a substrate by r

Details Vacuum coating apparatus for overall coating of a substrate by r Vacuum coating apparatus for overall coating of a substrate by r

1997-10-17

1999-11-16

Warden, Sr., Robert J.

Coating apparatus

Gas or vapor deposition

Work support

901 26, 901 43, 414758, 414783, 118730, C23C 1400, C23C 1450

Patent

active

059850361

ABSTRACT:
In a vacuum coating apparatus for an allover coating of a substrate by rotation of the substrate (3) in a stream of material, comprising a vacuum chamber with a material source (13), a substrate holder (6) with a point of attachment (19) for the holding of the substrate (3) in front of the material source (13) and a drive (10, 11, 21) provided for the substrate holder (6) for generating a rotating and shifting motion of the substrate (3), the substrate holder (6) is composed of three legs manufactured from hollow sections (7, 8, 9), disposed at angles to each other, where the first leg (7) and the second leg (8) form an obtuse angle (.alpha.) and the second and third legs (8 and 9) form an approximately right-angle knee, and the substrate (3) is held at the end of the third leg (9), where the substrate holder (6) is rotatable about the longitudinal axis (1) of the first leg (7) by a motor drive and in addition is shiftable axially to and from along this longitudinal axis (1).

REFERENCES:
patent: 4657472 (1987-04-01), Zimmer
patent: 4736645 (1988-04-01), Zimmer
patent: 4771652 (1988-09-01), Zimmer
patent: 4854808 (1989-08-01), Bruno
patent: 5102280 (1992-04-01), Poduje et al.
patent: 5558909 (1996-09-01), Poliquin et al.
patent: 5759268 (1998-06-01), Begin et al.
patent: 5763020 (1998-06-01), Yang

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