Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

1978-11-21

1980-03-11

Kimlin, Edward C.

Coating apparatus

With indicating, testing, inspecting, or measuring means

118730, 204192R, 427 35, 427 38, 427 42, 427252, 427295, 414217, C23C 1308

Patent

active

041922530

ABSTRACT:
Vacuum apparatus for coating substrates by rotation including a vacuum chamber with an elongated material source having a longitudinal axis and a transverse axis, a substrate rack with a plurality of fastening points for the planar arrangement of a plurality of substrates above the material source in a substantially uniform distribution over its surface and a drive associated with the substrate rack for rotating substrates. The substrate rack has to parallel substrate bearers disposed fork-wise with couplings for the substrates positioned on the confronting inner sides of the substrate bearers. The substrate bearers are connected by angle drives to the substrate couplings and a motor via a drive shaft.

REFERENCES:
patent: 3272175 (1966-09-01), Lorenz et al.
patent: 3336898 (1967-08-01), Simmons et al.
patent: 3714925 (1973-02-01), Helm
patent: 3858547 (1975-01-01), Bergfelt
patent: 4010710 (1977-03-01), Williams
patent: 4034704 (1977-07-01), Wossner et al.
patent: 4062318 (1927-12-01), Ban et al.

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