Vacuum coating apparatus

Details Vacuum coating apparatus Vacuum coating apparatus

1991-04-08

1993-03-02

Bueker, Richard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Sampling of associated base

118727, 118728, 427 9, 427 10, C23C 1424

Patent

active

051905906

ABSTRACT:
A vacuum coating apparatus for coating films on the surfaces of objects to be deposited under vacuum is provided with a vacuum deposition chamber, a carrier accommodated in the vacuum deposition chamber for carrying the objects, a rotary mechanism extending through the vacuum deposition chamber and being rotatable with respect to the carrier, and a container mounted on the rotary mechanism and accommodated in the vacuum deposition chamber. The container accommodates a material to be evaporated and is rotated by the rotary mechanism during a deposition operation while the objects are maintained stationary.

REFERENCES:
patent: 3625180 (1971-12-01), Smith
patent: 3695217 (1972-10-01), Jacobson
patent: 3915117 (1975-10-01), Schertler
patent: 4015558 (1977-04-01), Small
patent: 4226208 (1980-10-01), Nishida
patent: 4311725 (1982-01-01), Holland
patent: 4313254 (1982-02-01), Feldman
patent: 4632059 (1986-12-01), Flatscher
patent: 4681773 (1987-07-01), Bean

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