Radiant energy – Supported for nonsignalling objects of irradiation
Patent
1991-06-28
1993-03-02
Berman, Jack I.
Radiant energy
Supported for nonsignalling objects of irradiation
279 3, 269 21, 340611, H01L 2100
Patent
active
051912180
ABSTRACT:
A vacuum-attraction holding device includes a holding base having an attracting surface, for holding a substrate thereon; a suction passageway formed in the base, for supplying a vacuum to the holding base to attract the substrate to the attracting surface; and a pressure sensor provided in the base and being communicated with the suction passageway.
REFERENCES:
patent: 4269061 (1981-05-01), Hatsuno et al.
Chiba Yuji
Iwamoto Kazunori
Kasumi Kazuyuki
Marumo Mitsuji
Mori Tetsuzo
Berman Jack I.
Canon Kabushiki Kaisha
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