Vacuum chamber seals

Details Vacuum chamber seals Vacuum chamber seals

1980-10-10

1982-08-31

Smith, John D.

Coating apparatus

Gas or vapor deposition

Chamber seal

277237R, 118718, C23C 1310

Patent

active

043466699

ABSTRACT:
A vacuum chamber seal at the entry or exit end of a vacuum chamber comprises two rollers 15, 16 one 16 of which is rotatable, defining an air lock gap. A guide tube 18, spaced from the gap but within the chamber, is constructed and disposed to promote and acceleration of the air flowing past it towards the gap resulting in a pressure drop on the roller side of the guide tube and a pressure differential across a web of material passing over the guide tube 18 and through the gap. This differential urges the web into initimate contact with the rotatable roller 16 to prevent oscillation of the web entering the gap.

REFERENCES:
patent: 3158507 (1964-11-01), Alexander
patent: 3351348 (1967-11-01), Dupuis
patent: 3367667 (1968-02-01), Allen
patent: 3677076 (1972-07-01), Herzhoff et al.
patent: 3722899 (1973-03-01), Sedwell
patent: 4087992 (1978-05-01), Sando et al.

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