Vacuum chamber gate valve and method for making same

Details Vacuum chamber gate valve and method for making same Vacuum chamber gate valve and method for making same

1996-07-09

1997-09-16

Ferensic, Denise L.

Valves and valve actuation

With means to increase head and seat contact pressure

Gate valve

137559, 34242, F16K 2500

Patent

active

056671970

ABSTRACT:
Disclosed is a method for implementing a gate drive valve assembly used to isolate interfacing chambers. The method includes: (a) providing a drive assembly having at least one surface for attaching to a chamber, the drive assembly being mounted to the chamber such that a shaft contained within the drive assembly translates from the drive assembly through the at least one surface and along a bore in the chamber; and (b) attaching a gate plate to an end of the shaft when the shaft is at least partly within the chamber after translating along the bore.

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