Vacuum chamber gate valve

Details Vacuum chamber gate valve Vacuum chamber gate valve

1986-12-16

1988-01-26

Cohan, Alan

Valves and valve actuation

Fluid actuated or retarded

Piston type expansible chamber reciprocating valve actuator

251158, 251193, F16K 31122

Patent

active

047212829

ABSTRACT:
A gate valve assembly includes a housing, a shaft axially mounted within the housing, and a gate member secured to one end of the shaft. A mechanism within the housing is provided for axially extending and rotating the shaft in order to move the gate member into sealing engagement with a port in a processing chamber. By providing an expandable seal about the shaft and secured to the housing, the mechanical drive portion of the valve may be isolated from the interior of the chamber. The valve is particularly suitable for use with loadlocks and other chambers having a low pressure environment.

REFERENCES:
patent: 2838066 (1958-06-01), Harris
patent: 2880620 (1959-04-01), Bredtschneider
patent: 3442295 (1969-05-01), Ver Nooy
patent: 3525350 (1970-08-01), Hosek
patent: 3556472 (1971-01-01), Grove
patent: 3610574 (1971-10-01), Hartman
patent: 4195813 (1980-04-01), Cho
patent: 4433951 (1984-02-01), Koch et al.
patent: 4526341 (1985-07-01), Thomas

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