Vacuum chamber bakeout procedure for preventing ion gauge failur

Details Vacuum chamber bakeout procedure for preventing ion gauge failur Vacuum chamber bakeout procedure for preventing ion gauge failur

1997-09-02

2000-04-25

Ballato, Josie

Electricity: measuring and testing

Using ionization effects

For analysis of gas, vapor, or particles of matter

324460, G01N 2762

Patent

active

060548622

ABSTRACT:
A method for performing a bakeout test on a vacuum chamber without causing the ion gauge to fail turns the ion gauge off when it is not needed, even during part of the time that the chamber is held at a high vacuum, so as to minimize the opportunity for contaminants to react with and damage the ion gauge filament. Specifically, the method turns the gauge off when any heating elements in the chamber are turned on, so the added heat does not exacerbate the problems with reactions with the filament. Thus, the method turns the gauge off when the chamber is too hot. In one embodiment, the method employs a heating jacket to keep the gauge and its adapter from forming a cold spot at which water vapor can condense during part of the test.

REFERENCES:
patent: 3674984 (1972-07-01), Coats et al.
patent: 4534204 (1985-08-01), Berquist
patent: 4569829 (1986-02-01), Shih
patent: 4866640 (1989-09-01), Morrison
patent: 5443368 (1995-08-01), Weeks
patent: 5536330 (1996-07-01), Chen
Kendall, "cold cathode gauges for ultrahigh vacuum measurements", J. Vac. Sci. Tech. 15(3), May/Jun., p. 740,1997.
Akimichi, "Calibration of an axial symmetric transmission gauge in ultrahigh and extreme high vacuum", J. Vac. Sci. Tech. A 15(3), p. 753, May 1997.

Affiliated with

Also associated with

Rating

Vacuum chamber bakeout procedure for preventing ion gauge failur does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum chamber bakeout procedure for preventing ion gauge failur, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum chamber bakeout procedure for preventing ion gauge failur will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-996269