Communications: electrical – Condition responsive indicating system – Specific condition
Patent
1996-04-30
1998-06-02
Hofsass, Jeffery
Communications: electrical
Condition responsive indicating system
Specific condition
340584, 340603, 340679, 340626, 340521, 340540, 73709, 73 4V, 73749, 364557, 364558, 36455101, G08B 1700
Patent
active
057606935
ABSTRACT:
A vacuum controlling apparatus is provided. The vacuum level of a vacuum chamber can be accurately maintained by measuring and controlling the vacuum level of the vacuum chamber by using six parameters: desired pressure, predetermined time for reaching the desired pressure, predetermined temperature, actual pressure, actual time for reaching the desired pressure, and actual temperature.
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Hofsass Jeffery
Lee Benjamin C.
Samsung Electronics Co,. Ltd.
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