Vacuum apparatus and transfer apparatus

Details Vacuum apparatus and transfer apparatus Vacuum apparatus and transfer apparatus

2005-03-22

2005-03-22

Kramer, Dean J. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S749100, C414S935000

Reexamination Certificate

active

06869262

ABSTRACT:
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process chamber. The transfer apparatus has a pair of generally parallel and spaced-apart transfer bodies and a workpiece holder connected to the transfer bodies for supporting the workpiece. A feeding mechanism feeds the transfer bodies in a longitudinal direction thereof to position the workpiece holder and the workpiece in the process chamber.

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