Vacuum apparatus

Details Vacuum apparatus Vacuum apparatus

2005-05-24

2005-05-24

Robinson, Daniel (Department: 3742)

Pumps

Successive stages

C417S248000

Reexamination Certificate

active

06896490

ABSTRACT:
The present invention provides a vacuum apparatus that includes a plurality of vacuum containers each having a gas inlet and an exhaust outlet, a gas supply system for introducing a desired gas into each of the vacuum containers through the gas inlet, and an exhaust system for keeping each of the vacuum containers at a low pressure. In this vacuum apparatus, the exhaust system includes a plurality of multistage vacuum pumps connected in series. The exhaust outlet pressure of the last-stage vacuum pump is substantially at atmospheric pressure. The last-stage vacuum pump is designed to exhaust gas from a plurality of vacuum pumps at previous stages.

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