Vacuum activated backside contact

Details Vacuum activated backside contact Vacuum activated backside contact

1998-02-26

2000-07-18

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 3126

Patent

active

06091257&

ABSTRACT:
An apparatus for making and verifying electrical contact with the backside of a semiconductor wafer having a bulk portion covered with an insulating layer of oxide includes a contact probe, a wafer chuck having at least one probe vacuum groove and a probe aperture and a probe cylinder having a low pressure and a high pressure portion. The low pressure portion communicates with the probe vacuum groove and the probe aperture. The apparatus further includes a piston movably located between the low pressure and high pressure portions. The contact probe is attached to the piston and adapted to be protrudable from the probe aperture. The groove, aperture and low pressure portion are adapted to form a low pressure chamber with the wafer. The probe is urgeable to pierce the oxide and make electrical contact with the bulk portion of the wafer. The apparatus further includes a time-varying voltage source connectable between the chuck and the probe, and a current measuring device for measuring a current between the chuck and the probe. The probe is in electrical contact with the wafer if the current corresponds at least to a capacitive coupling between the chuck and the wafer.

REFERENCES:
patent: 4538104 (1985-08-01), Douglas et al.
patent: 4583042 (1986-04-01), Riemer
patent: 4870354 (1989-09-01), Davaut
patent: 5027063 (1991-06-01), Letourneau
patent: 5070297 (1991-12-01), Kwon et al.
patent: 5703493 (1997-12-01), Weeks et al.

Affiliated with

Also associated with

Rating

Vacuum activated backside contact does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum activated backside contact, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum activated backside contact will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2040372