Using an interferometer as a high speed variable attenuator

Details Using an interferometer as a high speed variable attenuator Using an interferometer as a high speed variable attenuator

2011-03-01

2011-03-01

Epps, Georgia Y (Department: 2878)

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C250S205000, C355S068000

Reexamination Certificate

active

07898646

ABSTRACT:
A system and method provides high speed variable attenuators. The attenuators can be used within a lithographic apparatus to control intensity of radiation in one or more correction pulses used to correct a dose of the radiation following an initial pulse of radiation.

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