Using a virtual profile library

Details Using a virtual profile library Using a virtual profile library

2007-12-04

2007-12-04

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

C356S511000

Reexamination Certificate

active

11396112

ABSTRACT:
To determine the profile of an integrated circuit structure, a signal is measured off the structure with a metrology device. The measured signal is compared to signals in a virtual profile library. The comparison is stopped if matching criteria are met. A subset of a virtual profile data space is determined when the matching criteria are not met. The subset is determined using profile data space associated with the library. A virtual profile signal of the subset is selected. Virtual profile shape/parameters are determined based on the virtual profile signal. A difference is calculated between the measured and virtual profile signals. The difference is compared to virtual profile library creation criteria. If the criteria are met, then the structure is identified using virtual profile data, which includes the virtual profile shape/parameters, associated with the virtual profile signal. Or, if the criteria are not met, then a corrective action is applied.

REFERENCES:
patent: 6609086 (2003-08-01), Bao et al.
patent: 6636843 (2003-10-01), Doddi et al.
patent: 6768983 (2004-07-01), Jakatdar et al.
patent: 6785638 (2004-08-01), Niu et al.
patent: 7126700 (2006-10-01), Bao et al.
patent: 2001/0051856 (2001-12-01), Niu et al.
Funk et al. Pending U.S. Appl. No. 11/394,859, filed Mar. 31, 2006.
Funk et al. Pending U.S. Appl. No. 11/394,860, filed Mar. 31, 2006.

Affiliated with

Also associated with

Rating

Using a virtual profile library does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Using a virtual profile library, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Using a virtual profile library will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3867938