Use of sol-gel derived tantalum oxide as a protective coating fo

Details Use of sol-gel derived tantalum oxide as a protective coating fo Use of sol-gel derived tantalum oxide as a protective coating fo

1990-06-11

1991-04-30

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156653, 156657, 156662, 437228, 437225, 310324, H01L 21306

Patent

active

050115685

ABSTRACT:
Thin film resonators are prepared by an improved process involving coating a patterned wafer with a sol-gel derived tantalum (V) oxide passivating film so that the circuitry can be protected from etching chemicals during the etching of vias through the back of the silicon wafer.

REFERENCES:
patent: 3791861 (1974-02-01), Sundahl, Jr.
patent: 4131985 (1979-01-01), Greenwood et al.
patent: 4310569 (1982-01-01), Harrington
patent: 4325984 (1982-04-01), Galfo et al.
patent: 4368220 (1983-01-01), Eldridge et al.
patent: 4436580 (1984-03-01), Boyd et al.
patent: 4456850 (1984-06-01), Inoue et al.
patent: 4618397 (1986-10-01), Shimizu et al.
patent: 4642508 (1987-02-01), Suzuki et al.
patent: 4719383 (1988-01-01), Wang et al.
patent: 4721938 (1988-04-01), Stevenson
patent: 4744861 (1988-05-01), Matsunaga et al.
patent: 4765864 (1988-08-01), Holland et al.
patent: 4801399 (1989-01-01), Clark et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4890370 (1990-01-01), Fukuda et al.

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