Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2006-10-31
2006-10-31
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
07130055
ABSTRACT:
A coefficient of a function that relates a measurement from a wafer to a parameter used in making the measurement (such as the power of a beam used in the measurement) is determined. The coefficient is used to evaluate the wafer (e.g. to accept or reject the wafer for further processing), and/or to control fabrication of another wafer. In one embodiment, the coefficient is used to control operation of a wafer processing unit (that may include, e.g. an ion implanter), or a heat treatment unit (such as a rapid thermal annealer).
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Borden Peter G.
Klemme Beverly J.
Nijmeijer Regina G.
Applied Materials Inc.
Lyons Michael A.
Suryadevara Omkar
Toatley , Jr. Gregory J.
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