Use of CMP for aluminum mirror and solar cell fabrication

Details Use of CMP for aluminum mirror and solar cell fabrication Use of CMP for aluminum mirror and solar cell fabrication

2005-06-30

2011-11-22

Scruggs, Robert (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S037000, C451S057000, C451S060000, C451S079000, C451S081000, C451S092000, C451S142000, C451S297000, C451S526000, C451S534000

Reexamination Certificate

active

08062096

ABSTRACT:
The invention is directed to a method of polishing a surface of a substrate comprising aluminum, comprising contacting a surface of the substrate with a polishing pad and a polishing composition comprising an abrasive, an agent that oxidizes aluminum, and a liquid carrier, and abrading at least a portion of the surface to remove at least some aluminum from the substrate and to polish the surface of the substrate, wherein the abrasive is in particulate form and is suspended in the liquid carrier.

REFERENCES:
patent: 3662501 (1972-05-01), Mendel
patent: 4769046 (1988-09-01), Senda et al.
patent: 4835909 (1989-06-01), Richter et al.
patent: 4839005 (1989-06-01), Katsumoto et al.
patent: 4959113 (1990-09-01), Roberts
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5209816 (1993-05-01), Yu et al.
patent: 5230833 (1993-07-01), Romberger et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5609511 (1997-03-01), Moriyama et al.
patent: 5643046 (1997-07-01), Katakabe et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5783489 (1998-07-01), Kaufman et al.
patent: 5838447 (1998-11-01), Hiyama et al.
patent: 5858813 (1999-01-01), Scherber et al.
patent: 5863838 (1999-01-01), Farkas et al.
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5897426 (1999-04-01), Somekh
patent: 5949927 (1999-09-01), Tang
patent: 5964643 (1999-10-01), Birang et al.
patent: 6033596 (2000-03-01), Kaufman et al.
patent: 6039891 (2000-03-01), Kaufman et al.
patent: 6099389 (2000-08-01), Nichols et al.
patent: 6287175 (2001-09-01), Marukawa et al.
patent: 6300249 (2001-10-01), Yoshida et al.
patent: 6316366 (2001-11-01), Kaufman et al.
patent: 6350176 (2002-02-01), Lyons et al.
patent: 6461227 (2002-10-01), Fang
patent: 6554878 (2003-04-01), Dill, Jr. et al.
patent: 6596150 (2003-07-01), Nishino et al.
patent: 6720265 (2004-04-01), Chopra
patent: 6830350 (2004-12-01), Thuli et al.
patent: 6896591 (2005-05-01), Chaneyalew et al.
patent: 2003/0082998 (2003-05-01), Carter et al.
patent: 2003/0124959 (2003-07-01), Schroeder et al.
patent: 2003/0220061 (2003-11-01), Prasad
patent: 2004/0165296 (2004-08-01), Schaefer
patent: 2005/0159085 (2005-07-01), Scott
Fang et al.,Journal of the Electrochemical Society, 151(12): G878-G881 (2004).
Ganguly et al.,Journal of the Electrochemical Society, 151(11): H232-H238 (2004).
Kuo et al.,Materials Chemistry and Physics, 69: 53-61 (2001).

Affiliated with

Also associated with

Rating

Use of CMP for aluminum mirror and solar cell fabrication does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Use of CMP for aluminum mirror and solar cell fabrication, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Use of CMP for aluminum mirror and solar cell fabrication will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4279099